Coating uniformity and device applicability of spin coated sol-gel PZT films

Conference proceeding

Peer reviewed

D. P Birnie, R. N Vogt, M. N Orr and J. R Schifko

Microelectronic engineering, Vol.29(1-4), pp.189-192

EMIF 1 : European meeting on integrated ferroelectrics

1995

Abstract

Electronics

Exact sciences and technology

Microelectronic fabrication (materials and surfaces technology)

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

Applied Sciences

13 Record Views

Title: Coating uniformity and device applicability of spin coated sol-gel PZT films
Creators: D. P Birnie - Univ. Arizona, dep. materials sci. eng., Tucson AZ 85721, United States
R. N Vogt - Univ. Arizona, dep. materials sci. eng., Tucson AZ 85721, United States
M. N Orr - Univ. Arizona, dep. materials sci. eng., Tucson AZ 85721, United States
J. R Schifko - Univ. Arizona, dep. materials sci. eng., Tucson AZ 85721, United States
Publication Details: Microelectronic engineering, Vol.29(1-4), pp.189-192
Conference: EMIF 1 : European meeting on integrated ferroelectrics
Date published: 1995
Publisher: Elsevier Science
Academic Unit: Materials Science and Engineering (SOE)
Language: English
Resource Type: Conference proceeding
Identifiers: 991031665206604646