Clustered defects in IC fabrication : impact on process control charts

Journal article

Peer reviewed

D. J FRIEDMAN and S. L ALBIN

IEEE transactions on semiconductor manufacturing, Vol.4(1), pp.36-42

1991

Abstract

Electronics

Applied sciences

Exact sciences and technology

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

12 Record Views

Title: Clustered defects in IC fabrication : impact on process control charts
Creators: D. J FRIEDMAN - AT&T Bell Laboratories, Murray Hill NJ 07974, United States
S. L ALBIN - AT&T Bell Laboratories, Murray Hill NJ 07974, United States
Publication Details: IEEE transactions on semiconductor manufacturing, Vol.4(1), pp.36-42
Date published: 1991
Publisher: Institute of Electrical and Electronics Engineers
Academic Unit: Industrial and Systems Engineering (SOE)
Language: English
Resource Type: Journal article
Identifiers: 991031654915504646