Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs

Journal article

Peer reviewed

T. S Kuan, P. E Batson, T. N Jackson, H Rupprecht and E. L Wilkie

Journal of applied physics, Vol.54(12), pp.6952-6957

1983

Abstract

Condensed matter: structure, mechanical and thermal properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Metals, semimetals and alloys

Other nonelectronic physical properties

Physical properties of thin films, nonelectronic

Solid surfaces and solid-solid interfaces

Specific materials

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

Materials Science

Physics

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Title: Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAs
Creators: T. S Kuan - IBM, T. J. Watson res. center
P. E Batson - IBM, T. J. Watson res. center
T. N Jackson - IBM, T. J. Watson res. center
H Rupprecht - IBM, T. J. Watson res. center
E. L Wilkie - IBM, T. J. Watson res. center
Publication Details: Journal of applied physics, Vol.54(12), pp.6952-6957
Date published: 1983
Publisher: American Institute of Physics
Academic Unit: Physics and Astronomy (SAS)
Language: English
Resource Type: Journal article
Identifiers: 991031665774204646