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Electronic structure in confined volumes using spatially resolved electron energy loss scattering
Journal article

Electronic structure in confined volumes using spatially resolved electron energy loss scattering

P.E Batson
Materials science & engineering. B, Solid-state materials for advanced technology, Vol.14(3), pp.297-303
1992
DOI: https://doi.org/10.1016/0921-5107(92)90312-W

Abstract

The instrumental requirements, spectral processing and interpretation for spatially resolved electron energy loss scattering appropriate for electronic structure determinations are reviewed. As an example, the recent Si L 2, 3 absorption spectra obtained with 0.2 eV resolution in GeSi alloy layers 5–50 nm thick are discussed.

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