Evolution of surface relief during firing of PZT thin films

Emil A Kneer; Dunbar P Birnie; J. C Podlesny; G Teowee

doi:10.1080/00150199408017598

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Evolution of surface relief during firing of PZT thin films

Journal article

Peer reviewed

Evolution of surface relief during firing of PZT thin films

Emil A Kneer, Dunbar P Birnie, J. C Podlesny and G Teowee

Ferroelectrics, Vol.152(1), pp.67-72

02/01/1994

DOI: https://doi.org/10.1080/00150199408017598

Abstract

A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiO x layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

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Title: Evolution of surface relief during firing of PZT thin films
Creators: Emil A Kneer - Dept. of Materials Science and Eng. , U. of Arizona
Dunbar P Birnie - Dept. of Materials Science and Eng. , U. of Arizona
J. C Podlesny - WYKO Corp
G Teowee - Donnelly Corp
Publication Details: Ferroelectrics, Vol.152(1), pp.67-72
Date published: 02/01/1994
Publisher: Taylor & Francis Group
Academic Unit: Materials Science and Engineering (SOE)
Language: English
Resource Type: Journal article
Identifiers: 991031665249904646