Formation of nanopores in a SiN∕SiO2 membrane with an electron beam

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Meng-Yue Wu, Diego Krapf, Mathijs Zandbergen, Henny Zandbergen and Philip E Batson

Applied physics letters, Vol.87(11), p.113106

09/12/2005

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Title: Formation of nanopores in a SiN∕SiO2 membrane with an electron beam
Creators: Meng-Yue Wu
Diego Krapf
Mathijs Zandbergen
Henny Zandbergen
Philip E Batson
Publication Details: Applied physics letters, Vol.87(11), p.113106
Date published: 09/12/2005
Academic Unit: Physics and Astronomy (SAS)
Language: English
Resource Type: Journal article
Identifiers: 991031665899304646