Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication

Emil A Kneer; Dunbar P Birnie; R. D Schrimpf; J. C Podlesny; G Teowee

doi:10.1080/10584589508220221

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Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication

Journal article

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Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication

Emil A Kneer, Dunbar P Birnie, R. D Schrimpf, J. C Podlesny and G Teowee

Integrated ferroelectrics, Vol.7(1-4), pp.61-73

02/01/1995

DOI: https://doi.org/10.1080/10584589508220221

Abstract

Hillock formation on Pt bottom electrode surfaces has been investigated for ⟨111⟩ Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

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Title: Investigation of surface roughness and hillock formation on platinized substrates used for Pt/PZT/Pt capacitor fabrication
Creators: Emil A Kneer - Department of Materials Science and Engineering , University of Arizona
Dunbar P Birnie - Department of Materials Science and Engineering , University of Arizona
R. D Schrimpf - Department of Electrical and Computer Engineering , University of Arizona
J. C Podlesny - WYKO Corporation
G Teowee - Donnelly Corporation
Publication Details: Integrated ferroelectrics, Vol.7(1-4), pp.61-73
Date published: 02/01/1995
Publisher: Taylor & Francis Group
Academic Unit: Materials Science and Engineering (SOE)
Language: English
Resource Type: Journal article
Identifiers: 991031665978404646