Laser interferometric calibration for real-time video color interpretation of thin fluid layers during spin coating

Journal article

Peer reviewed

Dunbar P Birnie, Dylan E Haas and Carissa M Hernandez

Optics and lasers in engineering, Vol.48(5), pp.533-537

2010

Abstract

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Interferometers

Optical instruments, equipment and techniques

Physics

4 Record Views

Title: Laser interferometric calibration for real-time video color interpretation of thin fluid layers during spin coating
Creators: Dunbar P Birnie - Department of Materials Science and Engineering Rutgers, The State University of New Jersey, 607 Taylor Rd., Piscataway, New Jersey 08854-8065, United States
Dylan E Haas - Department of Materials Science and Engineering Rutgers, The State University of New Jersey, 607 Taylor Rd., Piscataway, New Jersey 08854-8065, United States
Carissa M Hernandez - Department of Materials Science and Engineering Rutgers, The State University of New Jersey, 607 Taylor Rd., Piscataway, New Jersey 08854-8065, United States
Publication Details: Optics and lasers in engineering, Vol.48(5), pp.533-537
Date published: 2010
Publisher: Elsevier
Academic Unit: Materials Science and Engineering (SOE)
Language: English
Resource Type: Journal article
Identifiers: 991031665440504646