Abstract
Lead-Zirconate-Titanate (PZT) capacitors were built and tested. The devices consist of a monolithic Pt back electrode, ferroelectric PZT film deposited by the sol-gel method, a patterned Pt top electrode, and a Spin-On-Glass (SOG) passivation layer to protect as well as aid in flip chip bonding. Two commercial SOG solutions are used and compared in this paper, a phosphosilicate and a methylsiloxane.
This paper attempts to isolate the effects of the SOG layer and the additional processing steps on the final electrical properties of the FE capacitor. Electrical testing was done by using virtual ground mode, pulsed polarization reversal, to obtain the electrical behavior. The effect of moisture adsorption on the final electrical properties of the ferroelectric capacitors was also investigated. To achieve this end, several experiments were run, isolating the SOG processing steps, comparing the remanent polarization before and after each of the processing steps.