The relationship between local order, long range order, and sub-band-gap defects in hafnium oxide and hafnium silicate films

D Hill; R Bartynski; N Nguyen; Albert Davydov; Deane Chandler-Horowitz; Martin Frank; Brookhaven National Laboratory (BNL) National Synchrotron Light Source

doi:10.1063/1.2909442

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The relationship between local order, long range order, and sub-band-gap defects in hafnium oxide and hafnium silicate films

Journal article

Peer reviewed

The relationship between local order, long range order, and sub-band-gap defects in hafnium oxide and hafnium silicate films

D Hill, R Bartynski, N Nguyen, Albert Davydov, Deane Chandler-Horowitz, Martin Frank and Brookhaven National Laboratory (BNL) National Synchrotron Light Source

Journal of applied physics, Vol.103(9), pp.093712-093712-5

05/09/2008

DOI: https://doi.org/10.1063/1.2909442

Abstract

We have measured x-ray absorption spectra (XAS) at the oxygen K edge for hafnium oxide ( HfO 2 ) films grown by chemical vapor deposition (CVD) and atomic layer deposition (ALD), as well as for hafnium silicate (HfSiO) films grown by CVD. The XAS results are compared to x-ray diffraction (XRD) and spectroscopic ellipsometry (SE) data from the same films. Features characteristic of crystalline HfO 2 are observed in the XAS spectra from all CVD-grown HfO 2 films, even for a thickness of 5 nm where XRD is not sensitive. XAS and XRD spectra from the ALD-grown HfO 2 films exhibit the signature of crystallinity only for films that are 20 nm or thicker. These characteristic XAS features are absent in all HfSiO films measured, which is consistent with their being amorphous. The appearance of these peaks in XAS and XRD is correlated with sub-band-gap absorption in the SE spectra, which appears to be intrinsic to crystalline HfO 2 in the monoclinic phase.

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Title: The relationship between local order, long range order, and sub-band-gap defects in hafnium oxide and hafnium silicate films
Creators: D Hill - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
R Bartynski - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
N Nguyen - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
Albert Davydov - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
Deane Chandler-Horowitz - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
Martin Frank - Department of Physics and Astronomy and Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, USA
Brookhaven National Laboratory (BNL) National Synchrotron Light Source
Publication Details: Journal of applied physics, Vol.103(9), pp.093712-093712-5
Date published: 05/09/2008
Publisher: American Institute of Physics
Academic Unit: Laboratory for Surface Modification
Resource Type: Journal article
Identifiers: 991031665847104646