Thin-oxide dual-electron-injector annealing studies using conductivity and electron energy-loss spectroscopy

Journal article

Peer reviewed

L Dori, J Bruley, D. J Dimaria, P. E Batson, J Tornello and M Arienzo

Journal of applied physics, Vol.69(4), pp.2317-2323

1991

Abstract

Applied sciences

Compound structure devices

Electronics

Exact sciences and technology

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

6 Record Views

Title: Thin-oxide dual-electron-injector annealing studies using conductivity and electron energy-loss spectroscopy
Creators: L Dori - CNR, ist. LAMEL, Bologna 40126, Italy
J Bruley - CNR, ist. LAMEL, Bologna 40126, Italy
D. J Dimaria - CNR, ist. LAMEL, Bologna 40126, Italy
P. E Batson - CNR, ist. LAMEL, Bologna 40126, Italy
J Tornello - CNR, ist. LAMEL, Bologna 40126, Italy
M Arienzo - CNR, ist. LAMEL, Bologna 40126, Italy
Publication Details: Journal of applied physics, Vol.69(4), pp.2317-2323
Date published: 1991
Publisher: American Institute of Physics
Academic Unit: Physics and Astronomy (SAS)
Language: English
Resource Type: Journal article
Identifiers: 991031665731804646